Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Liu, Guote and Ye, Yuanhao and Luo, Bing and Gu, Yu and Zheng, Weijia and Chen, Sijun (2023) Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor. Frontiers in Energy Research, 10. ISSN 2296-598X

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Abstract

Abstract: In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric field measurement sensor model based on the principle of piezoelectric-piezoresistive coupling is constructed, and the sensor structure is optimized by analyzing the steady-state characteristics of the piezoelectric material and semiconductor membrane of the sensor. The input and output characteristics of the sensor were tested. The test results show that the sensor has excellent mechanical strain capacity, and the output voltage of the sensor has a linear relationship with the electric field strength, thus verifying the feasibility of the sensor measurement in the electric field. The research results will provide some reference for the development of contactless coupled sensors.

Item Type: Article
Subjects: Afro Asian Library > Energy
Depositing User: Unnamed user with email support@afroasianlibrary.com
Date Deposited: 01 May 2023 07:09
Last Modified: 14 Sep 2024 04:26
URI: http://classical.academiceprints.com/id/eprint/672

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